Effect of a DC external electric field on the properties of a nonuniform microwave discharge in hydrogen at reduced pressures
- Авторы: Lebedev Y.1, Krashevskaya G.1,2, Tatarinov A.1, Titov A.1, Epshtein I.1
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Учреждения:
- Topchiev Institute of Petrochemical Synthesis
- National Research Nuclear University “MEPhI,”
- Выпуск: Том 43, № 1 (2017)
- Страницы: 99-107
- Раздел: Low-Temperature Plasma
- URL: https://journals.rcsi.science/1063-780X/article/view/186411
- DOI: https://doi.org/10.1134/S1063780X1701007X
- ID: 186411
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Аннотация
The effect of a dc external electrical field on the properties of a highly nonuniform electrode microwave discharge in hydrogen at a pressure of 1 Torr was studied using optical emission spectroscopy and selfconsistent two-dimensional simulations. It is shown that the negative voltage applied to the antenna electrode with respect to the grounded chamber increases the discharge radiation intensity, while the positive voltage does not affect the discharge properties. The simulation results agree well with the experimental data.
Об авторах
Yu. Lebedev
Topchiev Institute of Petrochemical Synthesis
Автор, ответственный за переписку.
Email: lebedev@ips.ac.ru
Россия, Moscow, 119991
G. Krashevskaya
Topchiev Institute of Petrochemical Synthesis; National Research Nuclear University “MEPhI,”
Email: lebedev@ips.ac.ru
Россия, Moscow, 119991; Moscow, 115409
A. Tatarinov
Topchiev Institute of Petrochemical Synthesis
Email: lebedev@ips.ac.ru
Россия, Moscow, 119991
A. Titov
Topchiev Institute of Petrochemical Synthesis
Email: lebedev@ips.ac.ru
Россия, Moscow, 119991
I. Epshtein
Topchiev Institute of Petrochemical Synthesis
Email: lebedev@ips.ac.ru
Россия, Moscow, 119991