Автор туралы ақпарат

Makhviladze, T. M.

Шығарылым	Бөлім	Атауы	Файл
Том 45, № 4 (2016)	Article	Characteristics of the kinetics of periodic structures CMP for a nonlinear pressure dependence of the polishing rate
Том 47, № 1 (2018)	Article	Simulating the Effects of Internal Mechanical Stresses on the Decomposition Kinetics of a Supersaturated Oxygen Solution in Silicon
Том 47, № 5 (2018)	Article	The Model of the Process of the Chemical Mechanical Polishing of the Copper Metallization, Based on the Formation of the Passivation Layer
Том 48, № 6 (2019)	Article	Simulation of the Effect of the Grain Boundary Structure on Effective Ionic Charges in the Processes of Electromigration