Автор туралы ақпарат

Rogozhin, A. E.

Шығарылым	Бөлім	Атауы	Файл
Том 46, № 6 (2017)	Article	Electromagnetic Modeling, Technology, and Production of Microwave C³MOSHFET Switches on AlGaN/GaN Heterostructures
Том 47, № 1 (2018)	Article	Atomic Layer Deposition in the Production of a Gate HkMG Stack Structure with a Minimum Topological Size of 32 nm
Том 47, № 3 (2018)	Article	Dependence of the Resistance of the Negative e-Beam Resist HSQ Versus the Dose in the RIE and Wet Etching Processes