FLUOROPOLYMER FOR MICROELECTRONICS PRODUCTION (REVIEW)

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Abstract

A defining characteristic of microelectronic manufacturing is its exceptionally high standards for purity. These requirements apply to raw materials, final products, technological processes, equipment, and facilities. Such conditions are often achieved using aggressive reagents, necessitating equipment and tooling made from chemically resistant materials. Fluoropolymers (FPs) are a key class of materials that meet this need, with products made from them being integral to numerous microelectronic processes. For a long time, the necessary fluoropolymer products were imported. However, current sanctions have created an urgent need to establish their domestic production within the Russian Federation. Consequently, a thorough analysis of Russia’s fluoropolymer research and manufacturing capabilities is essential to address this challenge. The success of this endeavor will depend significantly on effective collaboration and mutual understanding between specialists in microelectronics and fluoropolymer materials – a central focus of this review. Particular attention is paid to products used for filtering aggressive reagents, purifying water and air, sampling and storing specimens, and conducting reactions with high-purity chemicals.

About the authors

E. N. Bolbasov

Tomsk Polytechnic University; V.E. Zuev Institute of Atmospheric Optics RAS

Email: floorplast@tpu.ru
Tomsk, Russia; Tomsk, Russia

V. M. Buznik

Tomsk State University; Kurnakov Institute of General and Inorganic Chemistry RAS

Email: buznikv@list.ru
Tomsk, Russia; Moscow, Russia

D. A. Varlamov

Molecular Electronics Research Institute

Zelenograd, Russia

A. O. Vorobiev

Tomsk Polytechnic University

Tomsk, Russia

G. E. Dubinenko

Tomsk Polytechnic University

Tomsk, Russia

A. I. Eremchuk

Molecular Electronics Research Institute

Zelenograd, Russia

M. E. Trusova

Tomsk Polytechnic University

Tomsk, Russia

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