Email this article Deformation of MEMS Transducer Membrane Due to Stress in Deposited Film
- Authors: Amelichev V.V.1, Generalov S.S.1, Godovitsyn I.V.1, Polomoshnov S.A.1, Saurov M.A.1
-
Affiliations:
- Scientific-Manufacturing Complex “Technological Centre”
- Issue: Vol 54, No 5 (2025)
- Pages: 447-458
- Section: ТЕХНОЛОГИИ
- URL: https://journals.rcsi.science/0544-1269/article/view/353912
- DOI: https://doi.org/10.7868/S3034548025050088
- ID: 353912
Cite item
Open Access
Access granted
Subscription Access
Abstract
Using the Ritz method, the maximum membrane deflection and the magnitude of mechanical stresses were calculated depending on the geometric dimensions of the membrane and the parameters of the deposited SiO 2 layer. A comparative assessment was made of the magnitude of deformation and mechanical stresses in the structure of an absolute pressure transducer with a polysilicon membrane radius of 50 μm and a “sandwich” structure of a MEMS acoustic pressure transducer consisting of polysilicon layers and deposited SiO 2 with a membrane radius of 300 μm, arising during the deposition of the SiO 2 layer.
About the authors
V. V. Amelichev
Scientific-Manufacturing Complex “Technological Centre”Zelenograd, Russia
S. S. Generalov
Scientific-Manufacturing Complex “Technological Centre”Zelenograd, Russia
I. V. Godovitsyn
Scientific-Manufacturing Complex “Technological Centre”
Email: I.Godovitsyn@tcen.ru
Zelenograd, Russia
S. A. Polomoshnov
Scientific-Manufacturing Complex “Technological Centre”Zelenograd, Russia
M. A. Saurov
Scientific-Manufacturing Complex “Technological Centre”Zelenograd, Russia
References
- Popescu D.S., Lammerink T.S.J., and Elwenspoek M. Buckled Membranes for Microstructures, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems, 1994, pp. 188–192.
- Fang W., Wickert J.A. Post Buckling of Micromachined Beams, J. of Micromechanics and Microengineering, vol. 4, 1994, pp. 116–122.
- Fang W., Wickert J.A. Determining Mean and Gradient Residual Stresses in Thin Films Using Micromachined Cantilevers, J. of Micromechanics and Microengineering, vol. 6, 1996, pp. 301–309.
- Ziebart V., Paul O., and Baltes H. Strongly Buckled Square Micromachined Membranes, J. of Microelectromechanical Systems, vol. 8, n. 4, December, 1999 pp. 423–432.
- Creek S., Chitica N. Deflection of Surface-Micromachined Devices Due to Internal, Homogeneous or Gradient, Stresses, Sensors and Actuators A-Physical, vol. 78, 1999, pp. 1–7.
- Zi S. SBIS Technology, Moscow, 1986, v. 1.
- Godovitsyn I.V., Amelichev V.V., Saurov A.N., Gavri- lov R.O., Generalov S.S. Miniature Strain Resistive Pressure Transducers: Results of Twenty-Five Years, Nano- and Microsystem Technology, 2011, no. 7, pp. 29–41.
- Godovitsyn I.V., Zimin V.N., Petrov A.Yu., Shelepin N.A. Subminiature Pressure Transducer for Special Applications, Microsystem Technology, 2001, no. 7, pp. 3–5.
- Godovitsyn I.V., Amelichev V.V., Pankov V.V., Saurov A.N. Miniature strain gauge pressure transducer with high sensitivity, Nano- and microsystems technology, 2012, no. 6, pp. 26–29.
- Timoshenko S.P., and Voinovsky-Krieger S. Plates and shells, Moscow, 1966, p. 380.
- Zawawi A., Hamzah A.A., Majlis B.Y., and Mohd-Yasin F. A Review of MEMS Capacitive Microphones, Micromachines, 2020, vol. 11, 484. https://doi.org/10.3390/mi11050484
- Alfutov N.A. Fundamentals of Calculating the Stability of Elastic Systems, Moscow, 1976, p. 64.
- Timoshenko S.P., and Voinovsky-Krieger S. Plates and Shells, Moscow, 1966, p. 444.
- Timoshenko S.P., and Voinovsky-Krieger S Plates and Shells, Moscow, 1966, p. 445.
- Chertishchev Yu., Ospennikova O.G., Boychuk A.S., Dikov I.A., Generalov A.S. Determination of the Size and Depth of Defects in Multilayer Honeycomb Structures Made of Polymeric Composites by the Value of Mechanical Impedance, Aviation Materials and Technologies, No. 3 (60) 2020, pp. 72–94.
- Alfutov N.A. Fundamentals of Calculation of Stability of Elastic Systems, Moscow, 1976, p. 165.
- Godovitsyn I.V., Generalov S.S., Polomoshnov S.A., Syvorotkin P.A . Development of a MEMS Microphone with an Unstressed Polysilicon Membrane // 3rd International Scientific and Technical Conference “Technologies of Micro- and Nanoelectronics in Micro- and Nanosystem Engineering” November 28–29, 2012, Zelenograd.
- Godovitsyn I.V., Generalov S.S., Polomoshnov S.A., Syvorotkin P.A., Amelichev V.V . Integrated Capacitor Acoustic Pressure Transducer for a Miniature MEMS Microphone // Nano- and Microsystem Engineering, 2014, No. 4, p. 43–50.
- Grigoriev D.M., Godovitsyn I.V., Amelichev V.V., Generalov S.S., Polomoshnov S.A . Using finite element modeling to calculate the CV characteristics of a MEMS condenser microphone // Microelectronics, 2017, Vol. 46, No. 6, pp. 430–438.
- Grigoriev D.M., Godovitsyn I.V., Amelichev V.V., Generalov S.S . Calculation of the frequency response of a MEMS microphone using finite element modeling // Microelectronics, 2018, Vol. 47, No. 3, pp. 238–243.
- Lawn B. Fracture of brittle solids, Cambridge University Press, 2nd edition, 1993.
- Boroch R.E. Mechanical Properties and Fatigue of Polycrystalline Silicon under Static and High Frequency Cyclic Loading, dissertation, 2008.
Supplementary files
