Processing of Silicon Carbide Plates with Bonded Diamond Tools

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Abstract

The article discusses the results obtained in the process of preliminary rough, fine and finish grinding of polycrystalline and monocrystalline silicon carbide plates using new types of bonded diamond tools on an organic binder and a new composition of cutting fluid.

About the authors

V. S. Kondratenko

MIREA – Russian Technological University

Email: kondratenko@mirea.ru
Moscow, Russia

A. A. Isaev

MIREA – Russian Technological University

Moscow, Russia

V. V. Kadomkin

MIREA – Russian Technological University

Moscow, Russia

G. M. Biryukov

MIREA – Russian Technological University

Moscow, Russia

I. I. Borodynkin

MIREA – Russian Technological University

Moscow, Russia

A. D. Tambovsky

JSC LZOS

Email: tambovskii@lzos.ru
Moscow Region, Lytkarino, Russia

References

  1. Zlomanov V.P . Silicon Carbide [ Karbid kremniya ]. Scientific and Educational Portal “Great Russian Encyclopedia”. https://bigenc.ru/c/karbid-kremniia-05308c [Published on June 26, 2023] (in Russia).
  2. Ivenin S.V . Processing of Monocrystalline Silicon Carbide Plates // [Obrabotka plastin monokristallicheskogo karbida kremniya]. Bulletin of Mordovian University. 2015. Vol. 25. No. 4. Pp. 37–47. https://doi.org/ 10.15507/0236-2910.025.201504.037
  3. Trofimov A.A . Modes of grinding and polishing of sapphire and silicon carbide wafers containing microwave monolithic integrated circuits // [Rezhimy shlifovaniya i polirovaniya plastin iz sapfira i karbida kremniya, soderzhashchikh SVCH monolitnye integral’nye skhemy]. Applied Physics. 2017. No. 3. Pp. 89–95 (in Russia).
  4. Alekhin S.S . Technological Assurance of Quality and Limitation of Crack Formation during Abrasive Processing of Thin Silicon Carbide Plates with Diamond Pastes // [Tekhnologicheskoe obespechenie kachestva i ogranichenie treshchinoobrazovaniya pri abrazivnoj obrabotke almaznymi pastami tonkikh plastin iz karbida kremniya]. Dissertation of the Candidate of Technical Sciences. Bryansk, 2023. http://www.tu-bryansk.ru/mainpage/dissertatsii/alekhin-sergey-sergeevich (in Russia).
  5. Kondratenko V.S . Diamond processing of materials // [Almaznaya obrabotka materialov]. [Monograph. Moscow, “Mechanical Engineering”, 2011]. 191 p. ISBN 978-5-94275-564-5 (in Russia).
  6. Kondratenko V.S., Kobysh A.N. Rogov A.Yu . Grinding and polishing in a new way // [Shlifovka i polirovka po-novomu]. “RITM”. No. 1. 2015. Moscow. P. 34 –40 (in Russia).
  7. Kondratenko V.S . High-Efficiency Materials-Processing Technology Based on New Types of Diamond Tools // [Vysokoehffektivnye tekhnologii obrabotki materialov na baze novykh tipov almaznogo instrumenta]. Glass and Ceramics. 2018. No. 5. Pp. 39–43 (in Russia).
  8. Kondratenko V.S . High-Efficiency Materials-Processing Technology Based on New Types of Diamond Tools. “Glass and Ceramics”. Vol. 75. Issue 5-6. September 2018. Pp. 202–205.
  9. Kondratenko V.S., Kadomkin V.V . Calculation of thermal processes in a bonded diamond tool when grinding glass and other materials // [Raschet teplovykh processov v svyazannom almaznom instrumente pri shlifovanii stekla i drugikh materialov]. “Glass and ceramics”. № 11. 2018. Moscow. Pp. 13–21 (in Russia).
  10. Kondratenko V.S., Kadomkin V.V . Calculation of Thermal Processes in a Bonded Diamond Tool During Grinding of Glass and Other Materials. Glass and Ceramics. 2019. Vol. 75. Nos. 11-12. Pp. 428–434.
  11. Kondratenko V.S., Kudzh S.A., Kadomkin V.V., and Vashchenko O.A . Influence of thermophysical processes in bonded diamond tool on processing parameters of optical materials // [Vliyanie teplofizicheskikh processov v svyazannom almaznom instrumente na parametry obrabotki opticheskikh materialov]. Optical Journal. 2020. Vol. 87. No. 5. Pp. 81–88 (in Russia).
  12. Kondratenko V.S., Kudzh S.A., Kadomkin V.V., Vashchenko O.A . Influence of Thermophysical Processes in Bonded Diamond Tools on the Processing Parameters of Optical Materials. Journal of Optical Technology. 2020. Vol. 87. No. 5. Pp. 313–317.
  13. Kondratenko V.S., Kobysh A.N., Kislyachenko V.G., and Tambovsky A.D . Optimization of the Lubricating and Cooling Fluid Composition for Grinding Various Materials with a Bonded Diamond Tool / Proceedings of the International Scientific and Technical Conference “Promising Materials and Technologies (PMT-2024)”. Vol. 1. Moscow, RTU MIREA, 2024, pp. 548–552 (in Russia).
  14. Kondratenko V.S., Gindin P.D., Burlya D.A., Kobysh A.N., Rogov A.Yu. Kondratenko E.V., Sakunenko Yu.I., Bobkov A.V . New Diamond Tool for Processing Optical Materials [Novyj almaznyj instrument dlya obrabotki opticheskikh materialov]. Optical Journal. 2017. Vol. 84. No. 6. Pp. 54–57 (in Russia).
  15. Kondratenko V.S., Isaev A.A., Kobysh A.N., Biryukov G.M., Borodynkin I.I., Tambovsky A.D., and Semyonov A.P . Development of a bonded diamond tool for processing silicon carbide / Collection of reports of the International Scientific and Technical Conference “Optical Technologies, Materials, and Systems (Optotech-2024)”. Moscow, RTU MIREA, 2024, pp. 158–163 (in Russia).

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