Study of the Sensor Properties of Ordered ZnO Nanorod Arrays for the Detection of UV Radiation
- Authors: Evstafieva M.V.1, Knyazev M.A.1, Korepanov V.I.1, Red’kin A.N.1, Roschupkin D.V.1, Yakimov E.E.1
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Affiliations:
- Institute of Problems of Microelectronics Technology and High-Purity Materials, Russian Academy of Sciences
- Issue: Vol 52, No 4 (2023)
- Pages: 322-328
- Section: СЕНСОРЫ
- URL: https://journals.rcsi.science/0544-1269/article/view/138577
- DOI: https://doi.org/10.31857/S0544126923700436
- EDN: https://elibrary.ru/HZVUIQ
- ID: 138577
Cite item
Abstract
Zinc oxide is one of the most promising materials used to create devices in the ultraviolet (UV) range. In this article, we study the sensor properties of ordered ZnO nanorod arrays grown by chemical vapor deposition. The possibility of their use as an indicator of UV radiation to control the dose of UV radiation, both from natural and artificial light sources, is assessed. The X-ray diffraction, Raman spectroscopy (RS), and cathodoluminescence (CL) data demonstrate the high quality of nanorods. Based on the ZnO nanorod array, a sensor prototype was fabricated based on the change in ZnO conductivity under the UV irradiation. A compari-son of the response of such a sensor with the readings of a UV radiometer showed a high correlation.
About the authors
M. V. Evstafieva
Institute of Problems of Microelectronics Technology and High-Purity Materials, Russian Academy of Sciences
Email: ryzhova@iptm.ru
Chernogolovka, Moscow region, 142432 Russia
M. A. Knyazev
Institute of Problems of Microelectronics Technology and High-Purity Materials, Russian Academy of Sciences
Email: ryzhova@iptm.ru
Chernogolovka, Moscow region, 142432 Russia
V. I. Korepanov
Institute of Problems of Microelectronics Technology and High-Purity Materials, Russian Academy of Sciences
Email: ryzhova@iptm.ru
Chernogolovka, Moscow region, 142432 Russia
A. N. Red’kin
Institute of Problems of Microelectronics Technology and High-Purity Materials, Russian Academy of Sciences
Email: ryzhova@iptm.ru
Chernogolovka, Moscow region, 142432 Russia
D. V. Roschupkin
Institute of Problems of Microelectronics Technology and High-Purity Materials, Russian Academy of Sciences
Email: ryzhova@iptm.ru
Chernogolovka, Moscow region, 142432 Russia
E. E. Yakimov
Institute of Problems of Microelectronics Technology and High-Purity Materials, Russian Academy of Sciences
Author for correspondence.
Email: ryzhova@iptm.ru
Chernogolovka, Moscow region, 142432 Russia
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