Formation of nanosized oxide films via thermal oxidation of Co3O4/InP heterostructures
- Авторы: Tomina E.1, Mittova I.1, Samsonov A.1, Sladkopevtsev B.1, Zelenina L.1, Baranova V.1
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Учреждения:
- Voronezh State University
- Выпуск: Том 87, № 1 (2017)
- Страницы: 8-12
- Раздел: Article
- URL: https://journals.rcsi.science/1070-3632/article/view/217778
- DOI: https://doi.org/10.1134/S1070363217010029
- ID: 217778
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Аннотация
Modification of InP film with magnetron-deposited 30 nm nanolayer of Co3O4 has resulted in the transit mechanism of thermal oxidation of the semiconductor and formation of nanosized oxide-phosphate films. Efficient transit interactions of Co3O4 with the semiconductor due to fast chemical binding of indium has led to the suppression of its diffusion inside the films. Secondary interactions of the oxides result in the formation of phosphate scaffold in the inner film regions, whereas the surface layer contains cobalt and indium oxides.
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Об авторах
E. Tomina
Voronezh State University
Автор, ответственный за переписку.
Email: tomina-e-v@yandex.ru
Россия, Universitetskaya pl. 1, Voronezh, 394018
I. Mittova
Voronezh State University
Email: tomina-e-v@yandex.ru
Россия, Universitetskaya pl. 1, Voronezh, 394018
A. Samsonov
Voronezh State University
Email: tomina-e-v@yandex.ru
Россия, Universitetskaya pl. 1, Voronezh, 394018
B. Sladkopevtsev
Voronezh State University
Email: tomina-e-v@yandex.ru
Россия, Universitetskaya pl. 1, Voronezh, 394018
L. Zelenina
Voronezh State University
Email: tomina-e-v@yandex.ru
Россия, Universitetskaya pl. 1, Voronezh, 394018
V. Baranova
Voronezh State University
Email: tomina-e-v@yandex.ru
Россия, Universitetskaya pl. 1, Voronezh, 394018