Investigation of the surface roughness of CdZnTe substrates by different techniques of nanometer accuracy
- 作者: Burlakov I.1, Denisov I.2, Sizov A.1, Silina A.3, Smirnova N.2
-
隶属关系:
- OAO NPO Orion
- OAO Giredmet
- Lomonosov State University of Fine Chemical Technologies
- 期: 卷 61, 编号 3 (2016)
- 页面: 333-337
- 栏目: Articles from the Russian Journal Prikladnaya Fizika
- URL: https://journals.rcsi.science/1064-2269/article/view/196847
- DOI: https://doi.org/10.1134/S1064226916030062
- ID: 196847
如何引用文章
详细
The results of measurements of the root-mean-square (rms) surface roughness of CdZnTe substrates by confocal microscopy (CM), atomic force microscopy (AFM), and X-ray reflectometry (XRR) are compared. It is determined that CM yields the highest rms roughness values, AFM assumes an intermediate position, and XRR measurements produce results that are an order of magnitude lower than those obtained with the use of the other two techniques. It is demonstrated that CM rms roughness values depend to a considerable extent on the type of the microscope objective used in experiments. Probable reasons for the discrepancy between the obtained results are discussed.
作者简介
I. Burlakov
OAO NPO Orion
编辑信件的主要联系方式.
Email: orion@orion-ir.ru
俄罗斯联邦, Kosinskaya ul. 9, Moscow, 111538
I. Denisov
OAO Giredmet
Email: orion@orion-ir.ru
俄罗斯联邦, Bol’shoi Tolmachevskii per. 5/1, Moscow, 119017
A. Sizov
OAO NPO Orion
Email: orion@orion-ir.ru
俄罗斯联邦, Kosinskaya ul. 9, Moscow, 111538
A. Silina
Lomonosov State University of Fine Chemical Technologies
Email: orion@orion-ir.ru
俄罗斯联邦, pr. Vernadskogo 86, Moscow, 119571
N. Smirnova
OAO Giredmet
Email: orion@orion-ir.ru
俄罗斯联邦, Bol’shoi Tolmachevskii per. 5/1, Moscow, 119017
![](/img/style/loading.gif)