Investigation of the surface roughness of CdZnTe substrates by different techniques of nanometer accuracy
- Авторы: Burlakov I.1, Denisov I.2, Sizov A.1, Silina A.3, Smirnova N.2
-
Учреждения:
- OAO NPO Orion
- OAO Giredmet
- Lomonosov State University of Fine Chemical Technologies
- Выпуск: Том 61, № 3 (2016)
- Страницы: 333-337
- Раздел: Articles from the Russian Journal Prikladnaya Fizika
- URL: https://journals.rcsi.science/1064-2269/article/view/196847
- DOI: https://doi.org/10.1134/S1064226916030062
- ID: 196847
Цитировать
Аннотация
The results of measurements of the root-mean-square (rms) surface roughness of CdZnTe substrates by confocal microscopy (CM), atomic force microscopy (AFM), and X-ray reflectometry (XRR) are compared. It is determined that CM yields the highest rms roughness values, AFM assumes an intermediate position, and XRR measurements produce results that are an order of magnitude lower than those obtained with the use of the other two techniques. It is demonstrated that CM rms roughness values depend to a considerable extent on the type of the microscope objective used in experiments. Probable reasons for the discrepancy between the obtained results are discussed.
Ключевые слова
Об авторах
I. Burlakov
OAO NPO Orion
Автор, ответственный за переписку.
Email: orion@orion-ir.ru
Россия, Kosinskaya ul. 9, Moscow, 111538
I. Denisov
OAO Giredmet
Email: orion@orion-ir.ru
Россия, Bol’shoi Tolmachevskii per. 5/1, Moscow, 119017
A. Sizov
OAO NPO Orion
Email: orion@orion-ir.ru
Россия, Kosinskaya ul. 9, Moscow, 111538
A. Silina
Lomonosov State University of Fine Chemical Technologies
Email: orion@orion-ir.ru
Россия, pr. Vernadskogo 86, Moscow, 119571
N. Smirnova
OAO Giredmet
Email: orion@orion-ir.ru
Россия, Bol’shoi Tolmachevskii per. 5/1, Moscow, 119017
![](/img/style/loading.gif)