Study of the Effect of Technetium as a Component of the Catalysts of the REE Compounds on the Process of Decomposition of Monohydrides of Silicon and Germanium
- Autores: Kovalevskiy A.1, Strogova A.1, Kusnetsov D.1, Voronets Y.1, Gran’ko S.1
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Afiliações:
- Belarusian State University of Informatics and Radioelectronics
- Edição: Volume 48, Nº 5 (2019)
- Páginas: 273-282
- Seção: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/187167
- DOI: https://doi.org/10.1134/S1063739719050056
- ID: 187167
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Resumo
The effect of technetium as a component of the catalysts of the REE compounds on the decomposition process of monohydrides of silicon and germanium during the growth of epitaxial films of silicon and a silicon-germanium solid solution is found. It is demonstrated that due to the fact that the unit cell radius of technetium is 1.358 Å and is similar to the unit cell radius of the platinum-group of elements (1.37–1.38 Å), as a component of the catalysts of REE compounds, it delivers the stability of the specific catalytic activity and high level of selectivity of the decomposition of monosilane and monogermane into \({\text{SiH}}_{2}^{{{\text{**}}}}\) and \({\text{GeH}}_{2}^{{{\text{**}}}}.\) This in turn allows carrying out the process of growing epitaxial films in two stages and, in this way, improving their quality.
Sobre autores
A. Kovalevskiy
Belarusian State University of Informatics and Radioelectronics
Email: strogova@bsuir.by
Belarus, Minsk, 220013
A. Strogova
Belarusian State University of Informatics and Radioelectronics
Autor responsável pela correspondência
Email: strogova@bsuir.by
Belarus, Minsk, 220013
D. Kusnetsov
Belarusian State University of Informatics and Radioelectronics
Email: strogova@bsuir.by
Belarus, Minsk, 220013
Ya. Voronets
Belarusian State University of Informatics and Radioelectronics
Email: strogova@bsuir.by
Belarus, Minsk, 220013
S. Gran’ko
Belarusian State University of Informatics and Radioelectronics
Email: strogova@bsuir.by
Belarus, Minsk, 220013