Development of the Technology of Magnetron Sputtering Deposition of LiPON Films and Investigation of Their Characteristics
- Авторы: Vasilev S.V.1,2, Lebedev M.E.1, Mazaletskii L.A.1,2, Metlitskaya A.V.1,2, Mironenko A.A.1, Naumov V.V.1, Novozhilova A.V.1,2, Rudyi A.S.1,2, Fedorov I.S.1
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Учреждения:
- Institute of Physics and Technology, Yaroslavl Branch
- Demidov Yaroslavl State University
- Выпуск: Том 46, № 6 (2017)
- Страницы: 424-432
- Раздел: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/186588
- DOI: https://doi.org/10.1134/S1063739717060099
- ID: 186588
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Аннотация
The results of developing the technology of magnetron sputtering deposition of a LiPON solid electrolyte and an experimental investigation of its characteristics are presented. The basic processing operations and parameters providing the formation of films of the proper morphology, structure, and elemental and phase composition are described. The data of the measurement of the physical parameters of the films by cyclic voltammetry and potentiometry are represented.
Об авторах
S. Vasilev
Institute of Physics and Technology, Yaroslavl Branch; Demidov Yaroslavl State University
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl; Yaroslavl
M. Lebedev
Institute of Physics and Technology, Yaroslavl Branch
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl
L. Mazaletskii
Institute of Physics and Technology, Yaroslavl Branch; Demidov Yaroslavl State University
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl; Yaroslavl
A. Metlitskaya
Institute of Physics and Technology, Yaroslavl Branch; Demidov Yaroslavl State University
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl; Yaroslavl
A. Mironenko
Institute of Physics and Technology, Yaroslavl Branch
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl
V. Naumov
Institute of Physics and Technology, Yaroslavl Branch
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl
A. Novozhilova
Institute of Physics and Technology, Yaroslavl Branch; Demidov Yaroslavl State University
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl; Yaroslavl
A. Rudyi
Institute of Physics and Technology, Yaroslavl Branch; Demidov Yaroslavl State University
Автор, ответственный за переписку.
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl; Yaroslavl
I. Fedorov
Institute of Physics and Technology, Yaroslavl Branch
Email: rudy@uniyar.ac.ru
Россия, Yaroslavl
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