Email this article Development of the Technology of Magnetron Sputtering Deposition of LiPON Films and Investigation of Their Characteristics
- Authors: Vasilev S.V.1,2, Lebedev M.E.1, Mazaletskii L.A.1,2, Metlitskaya A.V.1,2, Mironenko A.A.1, Naumov V.V.1, Novozhilova A.V.1,2, Rudyi A.S.1,2, Fedorov I.S.1
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Affiliations:
- Institute of Physics and Technology, Yaroslavl Branch
- Demidov Yaroslavl State University
- Issue: Vol 46, No 6 (2017)
- Pages: 424-432
- Section: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/186588
- DOI: https://doi.org/10.1134/S1063739717060099
- ID: 186588
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Abstract
The results of developing the technology of magnetron sputtering deposition of a LiPON solid electrolyte and an experimental investigation of its characteristics are presented. The basic processing operations and parameters providing the formation of films of the proper morphology, structure, and elemental and phase composition are described. The data of the measurement of the physical parameters of the films by cyclic voltammetry and potentiometry are represented.
About the authors
S. V. Vasilev
Institute of Physics and Technology, Yaroslavl Branch; Demidov Yaroslavl State University
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl; Yaroslavl
M. E. Lebedev
Institute of Physics and Technology, Yaroslavl Branch
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl
L. A. Mazaletskii
Institute of Physics and Technology, Yaroslavl Branch; Demidov Yaroslavl State University
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl; Yaroslavl
A. V. Metlitskaya
Institute of Physics and Technology, Yaroslavl Branch; Demidov Yaroslavl State University
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl; Yaroslavl
A. A. Mironenko
Institute of Physics and Technology, Yaroslavl Branch
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl
V. V. Naumov
Institute of Physics and Technology, Yaroslavl Branch
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl
A. V. Novozhilova
Institute of Physics and Technology, Yaroslavl Branch; Demidov Yaroslavl State University
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl; Yaroslavl
A. S. Rudyi
Institute of Physics and Technology, Yaroslavl Branch; Demidov Yaroslavl State University
Author for correspondence.
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl; Yaroslavl
I. S. Fedorov
Institute of Physics and Technology, Yaroslavl Branch
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl
