Мақаланы E-mail арқылы жіберу Development of the Technology of Magnetron Sputtering Deposition of LiPON Films and Investigation of Their Characteristics
- Авторлар: Vasilev S.1,2, Lebedev M.1, Mazaletskii L.1,2, Metlitskaya A.1,2, Mironenko A.1, Naumov V.1, Novozhilova A.1,2, Rudyi A.1,2, Fedorov I.1
-
Мекемелер:
- Institute of Physics and Technology, Yaroslavl Branch
- Demidov Yaroslavl State University
- Шығарылым: Том 46, № 6 (2017)
- Беттер: 424-432
- Бөлім: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/186588
- DOI: https://doi.org/10.1134/S1063739717060099
- ID: 186588
Дәйексөз келтіру
Ашық рұқсат
Рұқсат берілді
Тек жазылушылар үшін
Аннотация
The results of developing the technology of magnetron sputtering deposition of a LiPON solid electrolyte and an experimental investigation of its characteristics are presented. The basic processing operations and parameters providing the formation of films of the proper morphology, structure, and elemental and phase composition are described. The data of the measurement of the physical parameters of the films by cyclic voltammetry and potentiometry are represented.
Авторлар туралы
S. Vasilev
Institute of Physics and Technology, Yaroslavl Branch; Demidov Yaroslavl State University
Email: rudy@uniyar.ac.ru
Ресей, Yaroslavl; Yaroslavl
M. Lebedev
Institute of Physics and Technology, Yaroslavl Branch
Email: rudy@uniyar.ac.ru
Ресей, Yaroslavl
L. Mazaletskii
Institute of Physics and Technology, Yaroslavl Branch; Demidov Yaroslavl State University
Email: rudy@uniyar.ac.ru
Ресей, Yaroslavl; Yaroslavl
A. Metlitskaya
Institute of Physics and Technology, Yaroslavl Branch; Demidov Yaroslavl State University
Email: rudy@uniyar.ac.ru
Ресей, Yaroslavl; Yaroslavl
A. Mironenko
Institute of Physics and Technology, Yaroslavl Branch
Email: rudy@uniyar.ac.ru
Ресей, Yaroslavl
V. Naumov
Institute of Physics and Technology, Yaroslavl Branch
Email: rudy@uniyar.ac.ru
Ресей, Yaroslavl
A. Novozhilova
Institute of Physics and Technology, Yaroslavl Branch; Demidov Yaroslavl State University
Email: rudy@uniyar.ac.ru
Ресей, Yaroslavl; Yaroslavl
A. Rudyi
Institute of Physics and Technology, Yaroslavl Branch; Demidov Yaroslavl State University
Хат алмасуға жауапты Автор.
Email: rudy@uniyar.ac.ru
Ресей, Yaroslavl; Yaroslavl
I. Fedorov
Institute of Physics and Technology, Yaroslavl Branch
Email: rudy@uniyar.ac.ru
Ресей, Yaroslavl
