Effect of the mixture composition on the electrophysical parameters and emission spectra of CF2Cl2/Ar and CF2Cl2/He plasma

Resumo

The effect of the mixture was analyzed on the electrophysical parameters and emission spectra of CF₂Cl₂/Ar and CF₂Cl₂/He plasma. Data on the gas temperature and reduced electric field intensity are obtained. Based on the analysis of the plasma emission spectra, it is suggested that the dilution of CF₂Cl₂ with argon or helium, even in a 1-to-1 ratio, does not cause significant changes in the concentration of Cl atoms.