Effect of the mixture composition on the electrophysical parameters and emission spectra of CF2Cl2/Ar and CF2Cl2/He plasma
- 作者: Pivovarenok S.1
-
隶属关系:
- Research Institute for Thermodynamics and Kinetics of Chemical Processes
- 期: 卷 46, 编号 4 (2017)
- 页面: 267-271
- 栏目: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/186432
- DOI: https://doi.org/10.1134/S1063739717040072
- ID: 186432
如何引用文章
详细
The effect of the mixture was analyzed on the electrophysical parameters and emission spectra of CF2Cl2/Ar and CF2Cl2/He plasma. Data on the gas temperature and reduced electric field intensity are obtained. Based on the analysis of the plasma emission spectra, it is suggested that the dilution of CF2Cl2 with argon or helium, even in a 1-to-1 ratio, does not cause significant changes in the concentration of Cl atoms.
作者简介
S. Pivovarenok
Research Institute for Thermodynamics and Kinetics of Chemical Processes
编辑信件的主要联系方式.
Email: sap@isuct.ru
俄罗斯联邦, Ivanovo, 153000