Applications of the Technology of Fast Neutral Particle Beams in Micro- and Nanoelectronics
- Authors: Kudrya V.P.1, Maishev Y.P.1
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Affiliations:
- Institute of Physics and Technology
- Issue: Vol 47, No 5 (2018)
- Pages: 332-343
- Section: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/186892
- DOI: https://doi.org/10.1134/S1063739718050049
- ID: 186892
Cite item
Abstract
A brief review of the results of the application of fast neutral particle (FNP) beam sources in the field of the production technology of micro- and nanoelectronic devices published in the literature is presented. Processes such as surface cleaning; sputtering and etching of insulators, simiconductors, and metals; layer-by-layer etching; deposition of thin films directly from beams or by sputtering, and neutral-beam-enhanced deposition; oxidation, nitridation, and fluorination of a near-surface layer; production of the elements of micro- and nanoelectromechanical devices; nanostructuring; and modification of self-assembled organic molecular structures are considered. In addition, the results of investigating a decrease in the degree of degradation of the electrophysical properties of materials and electrical characteristics of device structures when passing from ion-beam technologies to FNP beams are discussed.
About the authors
V. P. Kudrya
Institute of Physics and Technology
Author for correspondence.
Email: kvp@ftian.ru
Russian Federation, Moscow, 117218
Yu. P. Maishev
Institute of Physics and Technology
Email: kvp@ftian.ru
Russian Federation, Moscow, 117218