Development of magnetic semiconductor microsystems technology


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Abstract

The results of the development of technologies of magnetic semiconductor chips based on thinfilm magnetoresistive multilayer structures are presented. A brief overview of the main achievements in the field of magnetometric devices based on anisotropic and giant magnetoresistive effects is made.

About the authors

V. V. Amelichev

State Research and Development Center of Russian Federation “Technological Center” MIET; National Research University of Electronic Technology MIET

Author for correspondence.
Email: V.Amelichev@tcen.ru
Russian Federation, Moscow, 124498; Moscow, 124498

I. E. Abanin

State Research and Development Center of Russian Federation “Technological Center” MIET

Email: V.Amelichev@tcen.ru
Russian Federation, Moscow, 124498

V. V. Aravin

Troops Unit 68240

Email: V.Amelichev@tcen.ru
Russian Federation, Moscow

D. V. Kostyuk

State Research and Development Center of Russian Federation “Technological Center” MIET; National Research University of Electronic Technology MIET

Email: V.Amelichev@tcen.ru
Russian Federation, Moscow, 124498; Moscow, 124498

S. I. Kasatkin

Trapeznikov Institute of Control Sciences

Email: V.Amelichev@tcen.ru
Russian Federation, Moscow, 117997

A. A. Reznev

Troops Unit 68240

Email: V.Amelichev@tcen.ru
Russian Federation, Moscow

A. N. Saurov

State Research and Development Center of Russian Federation “Technological Center” MIET; Institute of Nanotechnology of Microelectronics

Email: V.Amelichev@tcen.ru
Russian Federation, Moscow, 124498; Moscow, 119991


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