Scanning Probe Microscopy Used to Estimate the Structural Asymmetry of Filters with Micro- and Nanopores
- 作者: Bakulin V.N.1, Boshenyatov B.V.1, Valiev H.H.1, Karnet Y.N.1, Popov V.V.1, Snegireva N.S.1, Yumashev O.B.1
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隶属关系:
- Institute of Applied Mechanics, Russian Academy of Sciences
- 期: 卷 12, 编号 6 (2018)
- 页面: 1190-1193
- 栏目: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/196150
- DOI: https://doi.org/10.1134/S1027451018050403
- ID: 196150
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详细
The features of the surface structure of nanoporous and microporous polymer-membrane films promising for use in cleanrooms during the manufacturing of microelectronics products are examined. The degrees of asymmetry of selective and supporting surfaces are determined via scanning probe microscopy. The hydrodynamic characteristics of the membranes under study are analyzed.
作者简介
V. Bakulin
Institute of Applied Mechanics, Russian Academy of Sciences
Email: hhvlv@mail.ru
俄罗斯联邦, Moscow, 125040
B. Boshenyatov
Institute of Applied Mechanics, Russian Academy of Sciences
Email: hhvlv@mail.ru
俄罗斯联邦, Moscow, 125040
H. Valiev
Institute of Applied Mechanics, Russian Academy of Sciences
编辑信件的主要联系方式.
Email: hhvlv@mail.ru
俄罗斯联邦, Moscow, 125040
Yu. Karnet
Institute of Applied Mechanics, Russian Academy of Sciences
Email: hhvlv@mail.ru
俄罗斯联邦, Moscow, 125040
V. Popov
Institute of Applied Mechanics, Russian Academy of Sciences
Email: hhvlv@mail.ru
俄罗斯联邦, Moscow, 125040
N. Snegireva
Institute of Applied Mechanics, Russian Academy of Sciences
Email: hhvlv@mail.ru
俄罗斯联邦, Moscow, 125040
O. Yumashev
Institute of Applied Mechanics, Russian Academy of Sciences
Email: hhvlv@mail.ru
俄罗斯联邦, Moscow, 125040
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