Scanning Probe Microscopy Used to Estimate the Structural Asymmetry of Filters with Micro- and Nanopores


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The features of the surface structure of nanoporous and microporous polymer-membrane films promising for use in cleanrooms during the manufacturing of microelectronics products are examined. The degrees of asymmetry of selective and supporting surfaces are determined via scanning probe microscopy. The hydrodynamic characteristics of the membranes under study are analyzed.

作者简介

V. Bakulin

Institute of Applied Mechanics, Russian Academy of Sciences

Email: hhvlv@mail.ru
俄罗斯联邦, Moscow, 125040

B. Boshenyatov

Institute of Applied Mechanics, Russian Academy of Sciences

Email: hhvlv@mail.ru
俄罗斯联邦, Moscow, 125040

H. Valiev

Institute of Applied Mechanics, Russian Academy of Sciences

编辑信件的主要联系方式.
Email: hhvlv@mail.ru
俄罗斯联邦, Moscow, 125040

Yu. Karnet

Institute of Applied Mechanics, Russian Academy of Sciences

Email: hhvlv@mail.ru
俄罗斯联邦, Moscow, 125040

V. Popov

Institute of Applied Mechanics, Russian Academy of Sciences

Email: hhvlv@mail.ru
俄罗斯联邦, Moscow, 125040

N. Snegireva

Institute of Applied Mechanics, Russian Academy of Sciences

Email: hhvlv@mail.ru
俄罗斯联邦, Moscow, 125040

O. Yumashev

Institute of Applied Mechanics, Russian Academy of Sciences

Email: hhvlv@mail.ru
俄罗斯联邦, Moscow, 125040

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