Отправить статью по E-mail Scanning Probe Microscopy Used to Estimate the Structural Asymmetry of Filters with Micro- and Nanopores
- Авторы: Bakulin V.N.1, Boshenyatov B.V.1, Valiev H.H.1, Karnet Y.N.1, Popov V.V.1, Snegireva N.S.1, Yumashev O.B.1
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Учреждения:
- Institute of Applied Mechanics, Russian Academy of Sciences
- Выпуск: Том 12, № 6 (2018)
- Страницы: 1190-1193
- Раздел: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/196150
- DOI: https://doi.org/10.1134/S1027451018050403
- ID: 196150
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Аннотация
The features of the surface structure of nanoporous and microporous polymer-membrane films promising for use in cleanrooms during the manufacturing of microelectronics products are examined. The degrees of asymmetry of selective and supporting surfaces are determined via scanning probe microscopy. The hydrodynamic characteristics of the membranes under study are analyzed.
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Об авторах
V. Bakulin
Institute of Applied Mechanics, Russian Academy of Sciences
Email: hhvlv@mail.ru
Россия, Moscow, 125040
B. Boshenyatov
Institute of Applied Mechanics, Russian Academy of Sciences
Email: hhvlv@mail.ru
Россия, Moscow, 125040
H. Valiev
Institute of Applied Mechanics, Russian Academy of Sciences
Автор, ответственный за переписку.
Email: hhvlv@mail.ru
Россия, Moscow, 125040
Yu. Karnet
Institute of Applied Mechanics, Russian Academy of Sciences
Email: hhvlv@mail.ru
Россия, Moscow, 125040
V. Popov
Institute of Applied Mechanics, Russian Academy of Sciences
Email: hhvlv@mail.ru
Россия, Moscow, 125040
N. Snegireva
Institute of Applied Mechanics, Russian Academy of Sciences
Email: hhvlv@mail.ru
Россия, Moscow, 125040
O. Yumashev
Institute of Applied Mechanics, Russian Academy of Sciences
Email: hhvlv@mail.ru
Россия, Moscow, 125040
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