Scanning Probe Microscopy Used to Estimate the Structural Asymmetry of Filters with Micro- and Nanopores

V. N. Bakulin; B. V. Boshenyatov; H. H. Valiev; Yu. N. Karnet; V. V. Popov; N. S. Snegireva; O. B. Yumashev

doi:10.1134/S1027451018050403

Scanning Probe Microscopy Used to Estimate the Structural Asymmetry of Filters with Micro- and Nanopores

Authors: Bakulin V.N.¹, Boshenyatov B.V.¹, Valiev H.H.¹, Karnet Y.N.¹, Popov V.V.¹, Snegireva N.S.¹, Yumashev O.B.¹
Affiliations:
1. Institute of Applied Mechanics, Russian Academy of Sciences
Issue: Vol 12, No 6 (2018)
Pages: 1190-1193
Section: Article
URL: https://journals.rcsi.science/1027-4510/article/view/196150
DOI: https://doi.org/10.1134/S1027451018050403
ID: 196150

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Abstract

The features of the surface structure of nanoporous and microporous polymer-membrane films promising for use in cleanrooms during the manufacturing of microelectronics products are examined. The degrees of asymmetry of selective and supporting surfaces are determined via scanning probe microscopy. The hydrodynamic characteristics of the membranes under study are analyzed.