Neutron Reflectometry Studies of ZnO Films

V. D. Zhaketov; E. Chitanu; Yu. V. Nikitenko

doi:10.1134/S1027451018040195

Neutron Reflectometry Studies of ZnO Films

作者: Zhaketov V.D.¹, Chitanu E.², Nikitenko Y.V.¹
隶属关系:
1. Joint Institute for Nuclear Research
2. National Institute for Electrical Engineering ICPE-CA
期: 卷 12, 编号 4 (2018)
页面: 658-664
栏目: Article
URL: https://journals.rcsi.science/1027-4510/article/view/195711
DOI: https://doi.org/10.1134/S1027451018040195
ID: 195711

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详细

Textured Al-doped ZnO films are studied using neutron reflectometry. The films are quasiperiodic structures with a period of several nanometers. The films are inhomogeneous in a surface layer with a thickness of 10–20 nm.