Formation of a Track Template during PETP Irradiation with High-Energy Helium Ions for the Template Synthesis of Regular Microstructures

V. V. Sokhoreva; V. G. Kanaev; E. B. Kashkarov; E. S. Kulyukina; S. I. Kuznetsov

doi:10.1134/S1027451018030369

Formation of a Track Template during PETP Irradiation with High-Energy Helium Ions for the Template Synthesis of Regular Microstructures

作者: Sokhoreva V.V.¹, Kanaev V.G.², Kashkarov E.B.¹, Kulyukina E.S.¹, Kuznetsov S.I.¹
隶属关系:
1. National Research Tomsk Polytechnic University
2. Institute of Strength Physics and Materials Science, Siberian Branch
期: 卷 12, 编号 3 (2018)
页面: 598-602
栏目: Article
URL: https://journals.rcsi.science/1027-4510/article/view/195546
DOI: https://doi.org/10.1134/S1027451018030369
ID: 195546

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详细

The features of obtaining track membranes (TMs) with the help of a classical cyclotron situated at Tomsk Polytechnic University are discussed. It is demonstrated that TMs can be employed as templates. The results of research into columnar nanostructures formed with the help of a TM template are presented. The creation of regular microstructures is investigated using deep X-ray lithography with synchrotron radiation and templates made of track membranes.