Formation of a Track Template during PETP Irradiation with High-Energy Helium Ions for the Template Synthesis of Regular Microstructures


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Resumo

The features of obtaining track membranes (TMs) with the help of a classical cyclotron situated at Tomsk Polytechnic University are discussed. It is demonstrated that TMs can be employed as templates. The results of research into columnar nanostructures formed with the help of a TM template are presented. The creation of regular microstructures is investigated using deep X-ray lithography with synchrotron radiation and templates made of track membranes.

Sobre autores

V. Sokhoreva

National Research Tomsk Polytechnic University

Autor responsável pela correspondência
Email: smit@tpu.ru
Rússia, Tomsk, 634050

V. Kanaev

Institute of Strength Physics and Materials Science, Siberian Branch

Email: smit@tpu.ru
Rússia, Tomsk, 634050

E. Kashkarov

National Research Tomsk Polytechnic University

Email: smit@tpu.ru
Rússia, Tomsk, 634050

E. Kulyukina

National Research Tomsk Polytechnic University

Email: smit@tpu.ru
Rússia, Tomsk, 634050

S. Kuznetsov

National Research Tomsk Polytechnic University

Email: smit@tpu.ru
Rússia, Tomsk, 634050

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