Email this article Formation of a Track Template during PETP Irradiation with High-Energy Helium Ions for the Template Synthesis of Regular Microstructures
- Authors: Sokhoreva V.V.1, Kanaev V.G.2, Kashkarov E.B.1, Kulyukina E.S.1, Kuznetsov S.I.1
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Affiliations:
- National Research Tomsk Polytechnic University
- Institute of Strength Physics and Materials Science, Siberian Branch
- Issue: Vol 12, No 3 (2018)
- Pages: 598-602
- Section: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/195546
- DOI: https://doi.org/10.1134/S1027451018030369
- ID: 195546
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Abstract
The features of obtaining track membranes (TMs) with the help of a classical cyclotron situated at Tomsk Polytechnic University are discussed. It is demonstrated that TMs can be employed as templates. The results of research into columnar nanostructures formed with the help of a TM template are presented. The creation of regular microstructures is investigated using deep X-ray lithography with synchrotron radiation and templates made of track membranes.
About the authors
V. V. Sokhoreva
National Research Tomsk Polytechnic University
Author for correspondence.
Email: smit@tpu.ru
Russian Federation, Tomsk, 634050
V. G. Kanaev
Institute of Strength Physics and Materials Science, Siberian Branch
Email: smit@tpu.ru
Russian Federation, Tomsk, 634050
E. B. Kashkarov
National Research Tomsk Polytechnic University
Email: smit@tpu.ru
Russian Federation, Tomsk, 634050
E. S. Kulyukina
National Research Tomsk Polytechnic University
Email: smit@tpu.ru
Russian Federation, Tomsk, 634050
S. I. Kuznetsov
National Research Tomsk Polytechnic University
Email: smit@tpu.ru
Russian Federation, Tomsk, 634050
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