Investigation of secondary-emission signal formation in the low-voltage SEM mode

V. V. Kazmiruk; I. G. Kurganov; N. N. Osipov; A. A. Podkopaev; T. N. Savitskaya

doi:10.1134/S1027451016050086

Investigation of secondary-emission signal formation in the low-voltage SEM mode

Authors: Kazmiruk V.V.¹, Kurganov I.G.¹, Osipov N.N.¹, Podkopaev A.A.¹, Savitskaya T.N.¹
Affiliations:
1. Institute of Microelectronics Technology and High Purity Materials
Issue: Vol 10, No 5 (2016)
Pages: 887-891
Section: Article
URL: https://journals.rcsi.science/1027-4510/article/view/189605
DOI: https://doi.org/10.1134/S1027451016050086
ID: 189605

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Abstract

We present the results of studying secondary-emission signal formation in a scanning electron microscope; the signal is generated by the surface microrelief under an accelerating voltage of 0.3–3 kW with the detection of all secondary electrons.