Investigation of secondary-emission signal formation in the low-voltage SEM mode

V. V. Kazmiruk; I. G. Kurganov; N. N. Osipov; A. A. Podkopaev; T. N. Savitskaya

doi:10.1134/S1027451016050086

Investigation of secondary-emission signal formation in the low-voltage SEM mode

作者: Kazmiruk V.V.¹, Kurganov I.G.¹, Osipov N.N.¹, Podkopaev A.A.¹, Savitskaya T.N.¹
隶属关系:
1. Institute of Microelectronics Technology and High Purity Materials
期: 卷 10, 编号 5 (2016)
页面: 887-891
栏目: Article
URL: https://journals.rcsi.science/1027-4510/article/view/189605
DOI: https://doi.org/10.1134/S1027451016050086
ID: 189605

如何引用文章

全文:

开放存取

##reader.subscriptionAccessGranted##
受限制的访问

订阅存取

详细
作者简介
参考
补充文件
统计

详细

We present the results of studying secondary-emission signal formation in a scanning electron microscope; the signal is generated by the surface microrelief under an accelerating voltage of 0.3–3 kW with the detection of all secondary electrons.