Enviar artigo por via de e-mail Investigation of secondary-emission signal formation in the low-voltage SEM mode
- Autores: Kazmiruk V.V.1, Kurganov I.G.1, Osipov N.N.1, Podkopaev A.A.1, Savitskaya T.N.1
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Afiliações:
- Institute of Microelectronics Technology and High Purity Materials
- Edição: Volume 10, Nº 5 (2016)
- Páginas: 887-891
- Seção: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/189605
- DOI: https://doi.org/10.1134/S1027451016050086
- ID: 189605
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Resumo
We present the results of studying secondary-emission signal formation in a scanning electron microscope; the signal is generated by the surface microrelief under an accelerating voltage of 0.3–3 kW with the detection of all secondary electrons.
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Sobre autores
V. Kazmiruk
Institute of Microelectronics Technology and High Purity Materials
Autor responsável pela correspondência
Email: kazmiruk@iptm.ru
Rússia, Chernogolovka, Moscow oblast, 142432
I. Kurganov
Institute of Microelectronics Technology and High Purity Materials
Email: kazmiruk@iptm.ru
Rússia, Chernogolovka, Moscow oblast, 142432
N. Osipov
Institute of Microelectronics Technology and High Purity Materials
Email: kazmiruk@iptm.ru
Rússia, Chernogolovka, Moscow oblast, 142432
A. Podkopaev
Institute of Microelectronics Technology and High Purity Materials
Email: kazmiruk@iptm.ru
Rússia, Chernogolovka, Moscow oblast, 142432
T. Savitskaya
Institute of Microelectronics Technology and High Purity Materials
Email: kazmiruk@iptm.ru
Rússia, Chernogolovka, Moscow oblast, 142432
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