Change in the properties of polyimide films under combined proton and oxygen plasma irradiation
- Авторы: Novikov L.S.1,2, Voronina E.N.1, Chernik V.N.1, Zhilyakov L.A.1
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Учреждения:
- Skobeltsyn Institute of Nuclear Physics
- National Research University “Higher School of Economics”
- Выпуск: Том 10, № 4 (2016)
- Страницы: 829-833
- Раздел: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/189395
- DOI: https://doi.org/10.1134/S1027451016040327
- ID: 189395
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Аннотация
The results of experimental investigation of the combined action of 500-keV protons and ~20-eV oxygen plasma on thin polyimide films are presented. The samples are irradiated with a proton fluence of 1014–1016 cm–2 and an oxygen plasma fluence of ~1020 cm–2. The transmission and Raman spectra of the films, which are measured at different stages of sample irradiation, are compared. Data on the mass loss of the samples as a result of surface erosion are presented.
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Об авторах
L. Novikov
Skobeltsyn Institute of Nuclear Physics; National Research University “Higher School of Economics”
Email: info@pleiadesonline.com
Россия, Moscow, 119991; Moscow, 101000
E. Voronina
Skobeltsyn Institute of Nuclear Physics
Email: info@pleiadesonline.com
Россия, Moscow, 119991
V. Chernik
Skobeltsyn Institute of Nuclear Physics
Email: info@pleiadesonline.com
Россия, Moscow, 119991
L. Zhilyakov
Skobeltsyn Institute of Nuclear Physics
Email: info@pleiadesonline.com
Россия, Moscow, 119991
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