Change in the properties of polyimide films under combined proton and oxygen plasma irradiation

Аннотация

The results of experimental investigation of the combined action of 500-keV protons and ~20-eV oxygen plasma on thin polyimide films are presented. The samples are irradiated with a proton fluence of 10¹⁴–10¹⁶ cm^–2 and an oxygen plasma fluence of ~10²⁰ cm^–2. The transmission and Raman spectra of the films, which are measured at different stages of sample irradiation, are compared. Data on the mass loss of the samples as a result of surface erosion are presented.