Change in the properties of polyimide films under combined proton and oxygen plasma irradiation


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Abstract

The results of experimental investigation of the combined action of 500-keV protons and ~20-eV oxygen plasma on thin polyimide films are presented. The samples are irradiated with a proton fluence of 1014–1016 cm–2 and an oxygen plasma fluence of ~1020 cm–2. The transmission and Raman spectra of the films, which are measured at different stages of sample irradiation, are compared. Data on the mass loss of the samples as a result of surface erosion are presented.

About the authors

L. S. Novikov

Skobeltsyn Institute of Nuclear Physics; National Research University “Higher School of Economics”

Email: info@pleiadesonline.com
Russian Federation, Moscow, 119991; Moscow, 101000

E. N. Voronina

Skobeltsyn Institute of Nuclear Physics

Email: info@pleiadesonline.com
Russian Federation, Moscow, 119991

V. N. Chernik

Skobeltsyn Institute of Nuclear Physics

Email: info@pleiadesonline.com
Russian Federation, Moscow, 119991

L. A. Zhilyakov

Skobeltsyn Institute of Nuclear Physics

Email: info@pleiadesonline.com
Russian Federation, Moscow, 119991

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