A Comment on the Computer Simulation Program SRIM
- Авторлар: Shulga V.I.1
-
Мекемелер:
- Skobeltsyn Institute for Nuclear Physics, Moscow State University
- Шығарылым: Том 13, № 3 (2019)
- Беттер: 562-565
- Бөлім: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/196362
- DOI: https://doi.org/10.1134/S1027451019030339
- ID: 196362
Дәйексөз келтіру
Аннотация
The computer simulation program SRIM, unlike other well-known programs (MARLOWE, TRIM.SP, etc.), predicts non-zero values of the sputtering yield in the case of glancing ion bombardment of smooth amorphous targets. To understand the reason for this and other differences, simulation of the sputtering of a germanium target bombarded with 0.1–10-keV ions is carried out using the OKSANA program. It is shown that SRIM insufficiently correctly simulates the initial stage of the sputtering process.
Негізгі сөздер
Авторлар туралы
V. Shulga
Skobeltsyn Institute for Nuclear Physics, Moscow State University
Хат алмасуға жауапты Автор.
Email: vish008@yandex.ru
Ресей, Moscow, 119991
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