Email this article Study into the properties of TiN/WN multilayer nanocoatings prepared via magnetron sputtering
- Authors: Bodnarchuk V.I.1, Petrov P.2, Kozlenko D.P.1, Dechev D.2, Ivanov N.2, Martev I.2, Kasatkin I.A.3
-
Affiliations:
- Joint Institute for Nuclear Research
- Institute of Electronics
- St. Petersburg State University
- Issue: Vol 11, No 1 (2017)
- Pages: 186-189
- Section: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/191541
- DOI: https://doi.org/10.1134/S1027451017010244
- ID: 191541
Cite item
Open Access
Access granted
Subscription Access
Abstract
Titanium-nitride (TiN) and tungsten-nitride (WN) thin films with a layer thickness of 6 nm, which are obtained via magnetron sputtering on silicon substrates, are studied. The structural and mechanical properties are presented.
Keywords
About the authors
V. I. Bodnarchuk
Joint Institute for Nuclear Research
Author for correspondence.
Email: bodnarch@nf.jinr.ru
Russian Federation, Dubna, Moscow oblast, 141980
P. Petrov
Institute of Electronics
Email: bodnarch@nf.jinr.ru
Bulgaria, Sofia, 1784
D. P. Kozlenko
Joint Institute for Nuclear Research
Email: bodnarch@nf.jinr.ru
Russian Federation, Dubna, Moscow oblast, 141980
D. Dechev
Institute of Electronics
Email: bodnarch@nf.jinr.ru
Bulgaria, Sofia, 1784
N. Ivanov
Institute of Electronics
Email: bodnarch@nf.jinr.ru
Bulgaria, Sofia, 1784
I. Martev
Institute of Electronics
Email: bodnarch@nf.jinr.ru
Bulgaria, Sofia, 1784
I. A. Kasatkin
St. Petersburg State University
Email: bodnarch@nf.jinr.ru
Russian Federation, St. Petersburg, 199034
Supplementary files
