电邮这篇文章 Study into the properties of TiN/WN multilayer nanocoatings prepared via magnetron sputtering
- 作者: Bodnarchuk V.I.1, Petrov P.2, Kozlenko D.P.1, Dechev D.2, Ivanov N.2, Martev I.2, Kasatkin I.A.3
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隶属关系:
- Joint Institute for Nuclear Research
- Institute of Electronics
- St. Petersburg State University
- 期: 卷 11, 编号 1 (2017)
- 页面: 186-189
- 栏目: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/191541
- DOI: https://doi.org/10.1134/S1027451017010244
- ID: 191541
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详细
Titanium-nitride (TiN) and tungsten-nitride (WN) thin films with a layer thickness of 6 nm, which are obtained via magnetron sputtering on silicon substrates, are studied. The structural and mechanical properties are presented.
作者简介
V. Bodnarchuk
Joint Institute for Nuclear Research
编辑信件的主要联系方式.
Email: bodnarch@nf.jinr.ru
俄罗斯联邦, Dubna, Moscow oblast, 141980
P. Petrov
Institute of Electronics
Email: bodnarch@nf.jinr.ru
保加利亚, Sofia, 1784
D. Kozlenko
Joint Institute for Nuclear Research
Email: bodnarch@nf.jinr.ru
俄罗斯联邦, Dubna, Moscow oblast, 141980
D. Dechev
Institute of Electronics
Email: bodnarch@nf.jinr.ru
保加利亚, Sofia, 1784
N. Ivanov
Institute of Electronics
Email: bodnarch@nf.jinr.ru
保加利亚, Sofia, 1784
I. Martev
Institute of Electronics
Email: bodnarch@nf.jinr.ru
保加利亚, Sofia, 1784
I. Kasatkin
St. Petersburg State University
Email: bodnarch@nf.jinr.ru
俄罗斯联邦, St. Petersburg, 199034
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