Mo/Si Multilayer Mirrors with B4C and Be Barrier Layers

Abstract

Conventional Mo/Si mirrors and mirrors with B₄C and Be barrier layers, designed for reflection at wavelengths around 13.5 nm, are fabricated using magnetron sputtering and studied. Their reflectance is measured at different grazing angles and at different wavelengths. Four-component multilayer mirrors of the Mo/Be/Si/B₄C type are shown to surpass, in terms of the reflection coefficient, their Mo/Si and Mo/Si/B₄C counterparts by 2 and 1%, respectively, at wavelengths of incident radiation of 12.4, 12.7, 13.0, and 13.5 nm.