Mo/Si Multilayer Mirrors with B4C and Be Barrier Layers
- Авторы: Zuyev S.Y.1, Pariev D.E.1, Pleshkov R.S.1, Polkovnikov V.N.1, Salashchenko N.N.1, Svechnikov M.V.1, Sertsu M.G.1, Sokolov A.1, Chkhalo N.I.1, Schäfers F.1
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Учреждения:
- Institute for Physics of Microstructure, Russian Academy of Sciences
- Выпуск: Том 13, № 2 (2019)
- Страницы: 169-172
- Раздел: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/196236
- DOI: https://doi.org/10.1134/S1027451019020216
- ID: 196236
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Аннотация
Conventional Mo/Si mirrors and mirrors with B4C and Be barrier layers, designed for reflection at wavelengths around 13.5 nm, are fabricated using magnetron sputtering and studied. Their reflectance is measured at different grazing angles and at different wavelengths. Four-component multilayer mirrors of the Mo/Be/Si/B4C type are shown to surpass, in terms of the reflection coefficient, their Mo/Si and Mo/Si/B4C counterparts by 2 and 1%, respectively, at wavelengths of incident radiation of 12.4, 12.7, 13.0, and 13.5 nm.
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Об авторах
S. Zuyev
Institute for Physics of Microstructure, Russian Academy of Sciences
Email: polkovnikov@ipmras.ru
Россия, Nizhny Novgorod, 603087
D. Pariev
Institute for Physics of Microstructure, Russian Academy of Sciences
Email: polkovnikov@ipmras.ru
Россия, Nizhny Novgorod, 603087
R. Pleshkov
Institute for Physics of Microstructure, Russian Academy of Sciences
Email: polkovnikov@ipmras.ru
Россия, Nizhny Novgorod, 603087
V. Polkovnikov
Institute for Physics of Microstructure, Russian Academy of Sciences
Автор, ответственный за переписку.
Email: polkovnikov@ipmras.ru
Россия, Nizhny Novgorod, 603087
N. Salashchenko
Institute for Physics of Microstructure, Russian Academy of Sciences
Email: polkovnikov@ipmras.ru
Россия, Nizhny Novgorod, 603087
M. Svechnikov
Institute for Physics of Microstructure, Russian Academy of Sciences
Email: polkovnikov@ipmras.ru
Россия, Nizhny Novgorod, 603087
M. Sertsu
Institute for Physics of Microstructure, Russian Academy of Sciences
Email: polkovnikov@ipmras.ru
Россия, Nizhny Novgorod, 603087
A. Sokolov
Institute for Physics of Microstructure, Russian Academy of Sciences
Email: polkovnikov@ipmras.ru
Россия, Nizhny Novgorod, 603087
N. Chkhalo
Institute for Physics of Microstructure, Russian Academy of Sciences
Email: polkovnikov@ipmras.ru
Россия, Nizhny Novgorod, 603087
F. Schäfers
Institute for Physics of Microstructure, Russian Academy of Sciences
Email: polkovnikov@ipmras.ru
Россия, Nizhny Novgorod, 603087
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