Mo/Si Multilayer Mirrors with B4C and Be Barrier Layers


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Conventional Mo/Si mirrors and mirrors with B4C and Be barrier layers, designed for reflection at wavelengths around 13.5 nm, are fabricated using magnetron sputtering and studied. Their reflectance is measured at different grazing angles and at different wavelengths. Four-component multilayer mirrors of the Mo/Be/Si/B4C type are shown to surpass, in terms of the reflection coefficient, their Mo/Si and Mo/Si/B4C counterparts by 2 and 1%, respectively, at wavelengths of incident radiation of 12.4, 12.7, 13.0, and 13.5 nm.

Sobre autores

S. Zuyev

Institute for Physics of Microstructure, Russian Academy of Sciences

Email: polkovnikov@ipmras.ru
Rússia, Nizhny Novgorod, 603087

D. Pariev

Institute for Physics of Microstructure, Russian Academy of Sciences

Email: polkovnikov@ipmras.ru
Rússia, Nizhny Novgorod, 603087

R. Pleshkov

Institute for Physics of Microstructure, Russian Academy of Sciences

Email: polkovnikov@ipmras.ru
Rússia, Nizhny Novgorod, 603087

V. Polkovnikov

Institute for Physics of Microstructure, Russian Academy of Sciences

Autor responsável pela correspondência
Email: polkovnikov@ipmras.ru
Rússia, Nizhny Novgorod, 603087

N. Salashchenko

Institute for Physics of Microstructure, Russian Academy of Sciences

Email: polkovnikov@ipmras.ru
Rússia, Nizhny Novgorod, 603087

M. Svechnikov

Institute for Physics of Microstructure, Russian Academy of Sciences

Email: polkovnikov@ipmras.ru
Rússia, Nizhny Novgorod, 603087

M. Sertsu

Institute for Physics of Microstructure, Russian Academy of Sciences

Email: polkovnikov@ipmras.ru
Rússia, Nizhny Novgorod, 603087

A. Sokolov

Institute for Physics of Microstructure, Russian Academy of Sciences

Email: polkovnikov@ipmras.ru
Rússia, Nizhny Novgorod, 603087

N. Chkhalo

Institute for Physics of Microstructure, Russian Academy of Sciences

Email: polkovnikov@ipmras.ru
Rússia, Nizhny Novgorod, 603087

F. Schäfers

Institute for Physics of Microstructure, Russian Academy of Sciences

Email: polkovnikov@ipmras.ru
Rússia, Nizhny Novgorod, 603087

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