Email this article Formation of thin oxide layer on surface of copper caused by implantation of high-energy oxygen ions
- Authors: Khaydukov Y.N.1,2,3, Soltwedel O.1,2, Marchenko Y.A.4, Khaidukova D.Y.5, Csik A.6, Acartürk T.1, Starke U.1, Keller T.1,2, Guglya A.G.4, Kazdayev K.R.7
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Affiliations:
- Max Planck Institute for Solid State Research
- Max Planck Society Outstation at FRM-II
- Moscow State University, Skobeltsyn Institute of Nuclear Physics
- Kharkiv Institute of Physics and Technology
- Flerov Laboratory of Nuclear Reactions
- Institute for Nuclear Research
- LLP “Devir”
- Issue: Vol 11, No 1 (2017)
- Pages: 206-210
- Section: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/191738
- DOI: https://doi.org/10.1134/S1027451017010293
- ID: 191738
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Abstract
Combination of neutron and X-ray reflectometry was used to study the depth profile of 100 nm thin copper films with implanted oxygen ions with energy E = 10–30 keV and fluencies D = (0.2–5.4) ×1016 cm–2. The oxygen ion implantation at 30 keV was shown to lead to formation of 3 nm thick layer on the surface. Density and copper–oxygen stoichiometry of the observed surface layer was close to Cu2O oxide. We attribute the Cu2O oxide formation to highly mobilized copper atoms generated by stimulated ion implantation.
About the authors
Yu. N. Khaydukov
Max Planck Institute for Solid State Research; Max Planck Society Outstation at FRM-II; Moscow State University, Skobeltsyn Institute of Nuclear Physics
Author for correspondence.
Email: y.khaydukov@fkf.mpg.de
Germany, Stuttgart, 70569; Garching, D-85747; Moscow, 119991
O. Soltwedel
Max Planck Institute for Solid State Research; Max Planck Society Outstation at FRM-II
Email: y.khaydukov@fkf.mpg.de
Germany, Stuttgart, 70569; Garching, D-85747
Yu. A. Marchenko
Kharkiv Institute of Physics and Technology
Email: y.khaydukov@fkf.mpg.de
Ukraine, Kharkiv, 61108
D. Yu. Khaidukova
Flerov Laboratory of Nuclear Reactions
Email: y.khaydukov@fkf.mpg.de
Russian Federation, Dubna, 141980
A. Csik
Institute for Nuclear Research
Email: y.khaydukov@fkf.mpg.de
Hungary, Debrecen, H-4026
T. Acartürk
Max Planck Institute for Solid State Research
Email: y.khaydukov@fkf.mpg.de
Germany, Stuttgart, 70569
U. Starke
Max Planck Institute for Solid State Research
Email: y.khaydukov@fkf.mpg.de
Germany, Stuttgart, 70569
T. Keller
Max Planck Institute for Solid State Research; Max Planck Society Outstation at FRM-II
Email: y.khaydukov@fkf.mpg.de
Germany, Stuttgart, 70569; Garching, D-85747
A. G. Guglya
Kharkiv Institute of Physics and Technology
Email: y.khaydukov@fkf.mpg.de
Ukraine, Kharkiv, 61108
Kh. R. Kazdayev
LLP “Devir”
Email: y.khaydukov@fkf.mpg.de
Kazakhstan, Astana, 010000
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