Отправить статью по E-mail Formation of thin oxide layer on surface of copper caused by implantation of high-energy oxygen ions
- Авторы: Khaydukov Y.N.1,2,3, Soltwedel O.1,2, Marchenko Y.A.4, Khaidukova D.Y.5, Csik A.6, Acartürk T.1, Starke U.1, Keller T.1,2, Guglya A.G.4, Kazdayev K.R.7
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Учреждения:
- Max Planck Institute for Solid State Research
- Max Planck Society Outstation at FRM-II
- Moscow State University, Skobeltsyn Institute of Nuclear Physics
- Kharkiv Institute of Physics and Technology
- Flerov Laboratory of Nuclear Reactions
- Institute for Nuclear Research
- LLP “Devir”
- Выпуск: Том 11, № 1 (2017)
- Страницы: 206-210
- Раздел: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/191738
- DOI: https://doi.org/10.1134/S1027451017010293
- ID: 191738
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Аннотация
Combination of neutron and X-ray reflectometry was used to study the depth profile of 100 nm thin copper films with implanted oxygen ions with energy E = 10–30 keV and fluencies D = (0.2–5.4) ×1016 cm–2. The oxygen ion implantation at 30 keV was shown to lead to formation of 3 nm thick layer on the surface. Density and copper–oxygen stoichiometry of the observed surface layer was close to Cu2O oxide. We attribute the Cu2O oxide formation to highly mobilized copper atoms generated by stimulated ion implantation.
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Об авторах
Yu. Khaydukov
Max Planck Institute for Solid State Research; Max Planck Society Outstation at FRM-II; Moscow State University, Skobeltsyn Institute of Nuclear Physics
Автор, ответственный за переписку.
Email: y.khaydukov@fkf.mpg.de
Германия, Stuttgart, 70569; Garching, D-85747; Moscow, 119991
O. Soltwedel
Max Planck Institute for Solid State Research; Max Planck Society Outstation at FRM-II
Email: y.khaydukov@fkf.mpg.de
Германия, Stuttgart, 70569; Garching, D-85747
Yu. Marchenko
Kharkiv Institute of Physics and Technology
Email: y.khaydukov@fkf.mpg.de
Украина, Kharkiv, 61108
D. Khaidukova
Flerov Laboratory of Nuclear Reactions
Email: y.khaydukov@fkf.mpg.de
Россия, Dubna, 141980
A. Csik
Institute for Nuclear Research
Email: y.khaydukov@fkf.mpg.de
Венгрия, Debrecen, H-4026
T. Acartürk
Max Planck Institute for Solid State Research
Email: y.khaydukov@fkf.mpg.de
Германия, Stuttgart, 70569
U. Starke
Max Planck Institute for Solid State Research
Email: y.khaydukov@fkf.mpg.de
Германия, Stuttgart, 70569
T. Keller
Max Planck Institute for Solid State Research; Max Planck Society Outstation at FRM-II
Email: y.khaydukov@fkf.mpg.de
Германия, Stuttgart, 70569; Garching, D-85747
A. Guglya
Kharkiv Institute of Physics and Technology
Email: y.khaydukov@fkf.mpg.de
Украина, Kharkiv, 61108
Kh. Kazdayev
LLP “Devir”
Email: y.khaydukov@fkf.mpg.de
Казахстан, Astana, 010000
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