电邮这篇文章 Formation of thin oxide layer on surface of copper caused by implantation of high-energy oxygen ions
- 作者: Khaydukov Y.N.1,2,3, Soltwedel O.1,2, Marchenko Y.A.4, Khaidukova D.Y.5, Csik A.6, Acartürk T.1, Starke U.1, Keller T.1,2, Guglya A.G.4, Kazdayev K.R.7
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隶属关系:
- Max Planck Institute for Solid State Research
- Max Planck Society Outstation at FRM-II
- Moscow State University, Skobeltsyn Institute of Nuclear Physics
- Kharkiv Institute of Physics and Technology
- Flerov Laboratory of Nuclear Reactions
- Institute for Nuclear Research
- LLP “Devir”
- 期: 卷 11, 编号 1 (2017)
- 页面: 206-210
- 栏目: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/191738
- DOI: https://doi.org/10.1134/S1027451017010293
- ID: 191738
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详细
Combination of neutron and X-ray reflectometry was used to study the depth profile of 100 nm thin copper films with implanted oxygen ions with energy E = 10–30 keV and fluencies D = (0.2–5.4) ×1016 cm–2. The oxygen ion implantation at 30 keV was shown to lead to formation of 3 nm thick layer on the surface. Density and copper–oxygen stoichiometry of the observed surface layer was close to Cu2O oxide. We attribute the Cu2O oxide formation to highly mobilized copper atoms generated by stimulated ion implantation.
作者简介
Yu. Khaydukov
Max Planck Institute for Solid State Research; Max Planck Society Outstation at FRM-II; Moscow State University, Skobeltsyn Institute of Nuclear Physics
编辑信件的主要联系方式.
Email: y.khaydukov@fkf.mpg.de
德国, Stuttgart, 70569; Garching, D-85747; Moscow, 119991
O. Soltwedel
Max Planck Institute for Solid State Research; Max Planck Society Outstation at FRM-II
Email: y.khaydukov@fkf.mpg.de
德国, Stuttgart, 70569; Garching, D-85747
Yu. Marchenko
Kharkiv Institute of Physics and Technology
Email: y.khaydukov@fkf.mpg.de
乌克兰, Kharkiv, 61108
D. Khaidukova
Flerov Laboratory of Nuclear Reactions
Email: y.khaydukov@fkf.mpg.de
俄罗斯联邦, Dubna, 141980
A. Csik
Institute for Nuclear Research
Email: y.khaydukov@fkf.mpg.de
匈牙利, Debrecen, H-4026
T. Acartürk
Max Planck Institute for Solid State Research
Email: y.khaydukov@fkf.mpg.de
德国, Stuttgart, 70569
U. Starke
Max Planck Institute for Solid State Research
Email: y.khaydukov@fkf.mpg.de
德国, Stuttgart, 70569
T. Keller
Max Planck Institute for Solid State Research; Max Planck Society Outstation at FRM-II
Email: y.khaydukov@fkf.mpg.de
德国, Stuttgart, 70569; Garching, D-85747
A. Guglya
Kharkiv Institute of Physics and Technology
Email: y.khaydukov@fkf.mpg.de
乌克兰, Kharkiv, 61108
Kh. Kazdayev
LLP “Devir”
Email: y.khaydukov@fkf.mpg.de
哈萨克斯坦, Astana, 010000
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