Email this article Backscattered electron imaging of micro- and nanostructures: 5. SEM signal formation model
- Authors: Novikov Y.A.1,2
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Affiliations:
- A.M. Prokhorov General Physics Institute
- National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
- Issue: Vol 10, No 5 (2016)
- Pages: 892-905
- Section: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/189609
- DOI: https://doi.org/10.1134/S1027451016050116
- ID: 189609
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Abstract
A semiempirical model describing how images are formed in a scanning electron microscope operating in the backscattered electron collection mode is discussed. The model involves four imaging mechanisms. The model and the experiment are compared for grooves in silicon with rectangular and trapezoidal relief profiles.
About the authors
Yu. A. Novikov
A.M. Prokhorov General Physics Institute; National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Author for correspondence.
Email: nya@kapella.gpi.ru
Russian Federation, Moscow, 119991; Moscow, 115409
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