电邮这篇文章 Backscattered electron imaging of micro- and nanostructures: 5. SEM signal formation model
- 作者: Novikov Y.A.1,2
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隶属关系:
- A.M. Prokhorov General Physics Institute
- National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
- 期: 卷 10, 编号 5 (2016)
- 页面: 892-905
- 栏目: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/189609
- DOI: https://doi.org/10.1134/S1027451016050116
- ID: 189609
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详细
A semiempirical model describing how images are formed in a scanning electron microscope operating in the backscattered electron collection mode is discussed. The model involves four imaging mechanisms. The model and the experiment are compared for grooves in silicon with rectangular and trapezoidal relief profiles.
作者简介
Yu. Novikov
A.M. Prokhorov General Physics Institute; National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
编辑信件的主要联系方式.
Email: nya@kapella.gpi.ru
俄罗斯联邦, Moscow, 119991; Moscow, 115409
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