The Franz-Keldysh effect in silicon–ultrathin (3.7 nm) oxide–polysilicon structures
- Authors: Belorusov D.A.1, Goldman E.I.1, Chucheva G.V.1
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Affiliations:
- Kotelnikov Institute of Radioengineering and Electronics, Russian Academy of Sciences, Fryazino Branch
- Issue: Vol 68, No 9 (2023)
- Pages: 917-920
- Section: К 70-ЛЕТИЮ ИРЭ ИМ. В.А. КОТЕЛЬНИКОВА РАН
- URL: https://journals.rcsi.science/0033-8494/article/view/138429
- DOI: https://doi.org/10.31857/S0033849423090036
- EDN: https://elibrary.ru/SBHPRG
- ID: 138429
Cite item
Abstract
The manifestation of the Franz–Keldysh effect was discovered when illuminated by indirect daylight Al–n+-Si:P–SiO2–(100) n-Si structures with ultrathin (3.7 nm) oxide. It has been shown that the use of backlight even at low field voltages (up to 3 V) leads to an increase in the tunneling current through the oxide compared to the current in darkness by three orders of magnitude. A model of the influence of radiation on the process of electron tunneling through an ultrathin insulating layer has been constructed. At first as a result of the Franz–Keldysh effect, a radiation quantum is captured by an electron and this charge carrier tunnels through the barrier at a higher level compared to darkness. After a charge carrier enters a semiconductor, its energy is sufficient for several events of electron–hole pair production during impact ionization of silicon.
About the authors
D. A. Belorusov
Kotelnikov Institute of Radioengineering and Electronics, Russian Academy of Sciences, Fryazino Branch
Email: gvc@ms.ire.rssi.ru
Fryazino, Moscow oblast, 141190 Russia
E. I. Goldman
Kotelnikov Institute of Radioengineering and Electronics, Russian Academy of Sciences, Fryazino Branch
Email: gvc@ms.ire.rssi.ru
Fryazino, Moscow oblast, 141190 Russia
G. V. Chucheva
Kotelnikov Institute of Radioengineering and Electronics, Russian Academy of Sciences, Fryazino Branch
Author for correspondence.
Email: gvc@ms.ire.rssi.ru
Fryazino, Moscow oblast, 141190 Russia
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