Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition

A. I. Safonov; V. S. Sulyaeva; A. L. Bogoslovtseva; N. I. Timoshenko

doi:10.1134/S0021894418050103

Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition

Авторы: Safonov A.I.¹, Sulyaeva V.S.², Bogoslovtseva A.L.¹, Timoshenko N.I.¹
Учреждения:
1. Kutateladze Institute of Thermophysics, Siberian Branch
2. Nikolaev Institute of Inorganic Chemistry, Siberian Branch
Выпуск: Том 59, № 5 (2018)
Страницы: 842-846
Раздел: Article
URL: https://journals.rcsi.science/0021-8944/article/view/161309
DOI: https://doi.org/10.1134/S0021894418050103
ID: 161309

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Аннотация

The formation of a fluoropolymer coating by chemical deposition has been studied experimentally. It has been found that increasing the flow rate of the precursor gas leads to a decrease in the growth rate of the coating. Deposition conditions were analyzed, and the gas-dynamic parameters of the process were estimated. The estimates are consistent with experimental data.