Email this article Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition
- Authors: Safonov A.I.1, Sulyaeva V.S.2, Bogoslovtseva A.L.1, Timoshenko N.I.1
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Affiliations:
- Kutateladze Institute of Thermophysics, Siberian Branch
- Nikolaev Institute of Inorganic Chemistry, Siberian Branch
- Issue: Vol 59, No 5 (2018)
- Pages: 842-846
- Section: Article
- URL: https://journals.rcsi.science/0021-8944/article/view/161309
- DOI: https://doi.org/10.1134/S0021894418050103
- ID: 161309
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Abstract
The formation of a fluoropolymer coating by chemical deposition has been studied experimentally. It has been found that increasing the flow rate of the precursor gas leads to a decrease in the growth rate of the coating. Deposition conditions were analyzed, and the gas-dynamic parameters of the process were estimated. The estimates are consistent with experimental data.
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About the authors
A. I. Safonov
Kutateladze Institute of Thermophysics, Siberian Branch
Author for correspondence.
Email: safonov@itp.nsc.ru
Russian Federation, Novosibirsk, 630090
V. S. Sulyaeva
Nikolaev Institute of Inorganic Chemistry, Siberian Branch
Email: safonov@itp.nsc.ru
Russian Federation, Novosibirsk, 630090
A. L. Bogoslovtseva
Kutateladze Institute of Thermophysics, Siberian Branch
Email: safonov@itp.nsc.ru
Russian Federation, Novosibirsk, 630090
N. I. Timoshenko
Kutateladze Institute of Thermophysics, Siberian Branch
Email: safonov@itp.nsc.ru
Russian Federation, Novosibirsk, 630090
