Мақаланы E-mail арқылы жіберу Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition
- Авторлар: Safonov A.1, Sulyaeva V.2, Bogoslovtseva A.1, Timoshenko N.1
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Мекемелер:
- Kutateladze Institute of Thermophysics, Siberian Branch
- Nikolaev Institute of Inorganic Chemistry, Siberian Branch
- Шығарылым: Том 59, № 5 (2018)
- Беттер: 842-846
- Бөлім: Article
- URL: https://journals.rcsi.science/0021-8944/article/view/161309
- DOI: https://doi.org/10.1134/S0021894418050103
- ID: 161309
Дәйексөз келтіру
Ашық рұқсат
Рұқсат берілді
Тек жазылушылар үшін
Аннотация
The formation of a fluoropolymer coating by chemical deposition has been studied experimentally. It has been found that increasing the flow rate of the precursor gas leads to a decrease in the growth rate of the coating. Deposition conditions were analyzed, and the gas-dynamic parameters of the process were estimated. The estimates are consistent with experimental data.
Негізгі сөздер
Авторлар туралы
A. Safonov
Kutateladze Institute of Thermophysics, Siberian Branch
Хат алмасуға жауапты Автор.
Email: safonov@itp.nsc.ru
Ресей, Novosibirsk, 630090
V. Sulyaeva
Nikolaev Institute of Inorganic Chemistry, Siberian Branch
Email: safonov@itp.nsc.ru
Ресей, Novosibirsk, 630090
A. Bogoslovtseva
Kutateladze Institute of Thermophysics, Siberian Branch
Email: safonov@itp.nsc.ru
Ресей, Novosibirsk, 630090
N. Timoshenko
Kutateladze Institute of Thermophysics, Siberian Branch
Email: safonov@itp.nsc.ru
Ресей, Novosibirsk, 630090
