Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition

A. I. Safonov; V. S. Sulyaeva; A. L. Bogoslovtseva; N. I. Timoshenko

doi:10.1134/S0021894418050103

Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition

作者: Safonov A.I.¹, Sulyaeva V.S.², Bogoslovtseva A.L.¹, Timoshenko N.I.¹
隶属关系:
1. Kutateladze Institute of Thermophysics, Siberian Branch
2. Nikolaev Institute of Inorganic Chemistry, Siberian Branch
期: 卷 59, 编号 5 (2018)
页面: 842-846
栏目: Article
URL: https://journals.rcsi.science/0021-8944/article/view/161309
DOI: https://doi.org/10.1134/S0021894418050103
ID: 161309

如何引用文章

全文:

开放存取

##reader.subscriptionAccessGranted##
受限制的访问

订阅存取

详细
作者简介
参考
补充文件
统计

详细

The formation of a fluoropolymer coating by chemical deposition has been studied experimentally. It has been found that increasing the flow rate of the precursor gas leads to a decrease in the growth rate of the coating. Deposition conditions were analyzed, and the gas-dynamic parameters of the process were estimated. The estimates are consistent with experimental data.