Evaluation of the Component of Bias of X-Ray Microanalysis Related to Surface Relief of the Specimen


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A semiempirical approach to the a priori evaluation of the effect of the surface relief on the results of X-ray spectral analysis of binary compounds is proposed. Dimensionless parameter k characterizing the effect of the relief on the intensity of intrinsic X-ray radiation is determined using the experimental data obtained for reference monocrystal specimens GaAs with known geometrical parameters of the relief.

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A. Vasil’ev

National Research Center Kurchatov Institute

Email: fgupnicpv@mail.ru
俄罗斯联邦, Moscow

V. Mityukhlyaev

Research Center on the Study of Properties of Surface and Vacuum

Email: fgupnicpv@mail.ru
俄罗斯联邦, Moscow

A. Mikhutkin

National Research Center Kurchatov Institute

Email: fgupnicpv@mail.ru
俄罗斯联邦, Moscow

P. Todua

Research Center on the Study of Properties of Surface and Vacuum; Moscow Institute of Physics and Technology

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Email: fgupnicpv@mail.ru
俄罗斯联邦, Moscow; Dolgoprudnyi

M. Filippov

Research Center on the Study of Properties of Surface and Vacuum; Moscow Institute of Physics and Technology; Kurnakov Institute of General and Inorganic Chemistry

Email: fgupnicpv@mail.ru
俄罗斯联邦, Moscow; Dolgoprudnyi; Moscow

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