Evaluation of the Component of Bias of X-Ray Microanalysis Related to Surface Relief of the Specimen


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Resumo

A semiempirical approach to the a priori evaluation of the effect of the surface relief on the results of X-ray spectral analysis of binary compounds is proposed. Dimensionless parameter k characterizing the effect of the relief on the intensity of intrinsic X-ray radiation is determined using the experimental data obtained for reference monocrystal specimens GaAs with known geometrical parameters of the relief.

Sobre autores

A. Vasil’ev

National Research Center Kurchatov Institute

Email: fgupnicpv@mail.ru
Rússia, Moscow

V. Mityukhlyaev

Research Center on the Study of Properties of Surface and Vacuum

Email: fgupnicpv@mail.ru
Rússia, Moscow

A. Mikhutkin

National Research Center Kurchatov Institute

Email: fgupnicpv@mail.ru
Rússia, Moscow

P. Todua

Research Center on the Study of Properties of Surface and Vacuum; Moscow Institute of Physics and Technology

Autor responsável pela correspondência
Email: fgupnicpv@mail.ru
Rússia, Moscow; Dolgoprudnyi

M. Filippov

Research Center on the Study of Properties of Surface and Vacuum; Moscow Institute of Physics and Technology; Kurnakov Institute of General and Inorganic Chemistry

Email: fgupnicpv@mail.ru
Rússia, Moscow; Dolgoprudnyi; Moscow

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