Email this article Evaluation of the Component of Bias of X-Ray Microanalysis Related to Surface Relief of the Specimen
- Authors: Vasil’ev A.L.1, Mityukhlyaev V.B.2, Mikhutkin A.A.1, Todua P.A.2,3, Filippov M.N.2,3,4
-
Affiliations:
- National Research Center Kurchatov Institute
- Research Center on the Study of Properties of Surface and Vacuum
- Moscow Institute of Physics and Technology
- Kurnakov Institute of General and Inorganic Chemistry
- Issue: Vol 53, No 14 (2017)
- Pages: 1463-1466
- Section: Analysis of Substances
- URL: https://journals.rcsi.science/0020-1685/article/view/158366
- DOI: https://doi.org/10.1134/S0020168517140163
- ID: 158366
Cite item
Open Access
Access granted
Subscription Access
Abstract
A semiempirical approach to the a priori evaluation of the effect of the surface relief on the results of X-ray spectral analysis of binary compounds is proposed. Dimensionless parameter k characterizing the effect of the relief on the intensity of intrinsic X-ray radiation is determined using the experimental data obtained for reference monocrystal specimens GaAs with known geometrical parameters of the relief.
Keywords
About the authors
A. L. Vasil’ev
National Research Center Kurchatov Institute
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
V. B. Mityukhlyaev
Research Center on the Study of Properties of Surface and Vacuum
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
A. A. Mikhutkin
National Research Center Kurchatov Institute
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
P. A. Todua
Research Center on the Study of Properties of Surface and Vacuum; Moscow Institute of Physics and Technology
Author for correspondence.
Email: fgupnicpv@mail.ru
Russian Federation, Moscow; Dolgoprudnyi
M. N. Filippov
Research Center on the Study of Properties of Surface and Vacuum; Moscow Institute of Physics and Technology; Kurnakov Institute of General and Inorganic Chemistry
Email: fgupnicpv@mail.ru
Russian Federation, Moscow; Dolgoprudnyi; Moscow
Supplementary files
